Hear the following speakers on March 16, 2017:
New plasma-assisted manufacturing technologies for optical surfaces
Dr. Marcel Schulze SENTECH Instruments GmbH Berlin
Measurement and simulation of the mechanical behavior of optical coatings
Dr. Thomas Chudoba, ASMEC - Advanced Surface Mechanics GmbH Radeberg
Coating of lithographic optics (working title)
Dr. Roland Lörcher
Semiconductor Manufacturing Technology Business Group Carl Zeiss SMT GmbH Oberkochen
Current developments in the field of chirped optics
Dr. Peter Zimmermann LAYERTEC GmbH Mellingen